Published October 2001
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The structural defects in silicon implanted by hydrogen
Creators
- 1. Hagenskij univ., Hagen (Germany)
- 2. Fiz.-tekh. inst. im. Ioffe, Sankt-Peterburg (Russian Federation)
- 3. Inst. fiziki tsverdaga tsela i polupravadnikow, Natsyyanal'naya akadehmiya navuk Belarusi, Minsk (Belarus)
Description
The defects created by hydrogen implantation (40 - 80 keV, 5·1014 - 3·1016 cm-2) into silicon are studied by low-temperature (4.2 K) photoluminescence (P L) spectroscopy. After high-temperature heat treatments the Pl method indicates a rather strong bands at about 1.012 eV and 0.8 eV. The kinetics of the formation of the main optical active defects have been studied. It is confirmed that incorporated hydrogen to take an active part in the formation of the structure of some luminescence centers. The possible nature of the main luminescence centers are discussed in this work
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Additional details
Additional titles
- Original title (Russian)
- Дефекты структуры в кремнии, имплантированном водородом
Publishing Information
- Imprint Place
- Minsk (Belarus)
- ISBN
- 985-445-236-0
- Imprint Title
- Proceedings of the Fourth international conference 'Interaction of radiation with solids'
- Imprint Pagination
- 396 p.
- Journal Page Range
- p. 189-191
- Report number
- INIS-BY--059
Conference
- Title
- 4. international conference 'Interaction of radiation with solids'
- Original Conference Title
- Chetvertaya mezhdunarodnaya konferentsiya 'Vzaimodejstvie izluchenij s tverdym telom'
- Dates
- 3-5 Oct 2001
- Place
- Minsk (Belarus)
INIS
- Country of Publication
- Belarus
- Country of Input or Organization
- Belarus
- INIS RN
- 32068680
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- ANNEALING; HYDROGEN IONS; ION IMPLANTATION; PHOTOLUMINESCENCE; PHYSICAL RADIATION EFFECTS; SILICON
- Descriptors DEC
- CHARGED PARTICLES; ELEMENTS; EMISSION; HEAT TREATMENTS; IONS; LUMINESCENCE; PHOTON EMISSION; RADIATION EFFECTS; SEMIMETALS
Optional Information
- Notes
- 12 refs., 3 figs. Imprint:Materialy chetvertoj mezhdunarodnoj konferentsii 'Vzaimodejstvie izluchenij s tverdym telom'