Published August 6, 2003 | Version v1
Journal article

The study of composition non-uniformity in ternary MgxZn1-xO thin films

  • 1. Laboratory of Condensed Matter Spectroscopy and Opto-Electronic Physics, Department of Physics, Shanghai Jiao Tong University, 1954 Hua Shan Road, Shanghai 200030 (China)
  • 2. Department of Physics, Zhejiang University, Hangzhou 310028 (China)
  • 3. State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050 (China)

Description

We report on the growth of single cubic-phase MgZnO thin films by reactive electron beam evaporation on sapphire substrates. A detailed theoretical procedure has been employed to analyse the transmission profile for information on composition non-uniformity, in addition to the exact determination of the band gap energy. The study of composition non-uniformity has been further extended to both the typically reported hexagonal and cubic MgZnO thin films. It is found that the composition non-uniformity strongly depends on the Mg content, which can be well explained by the ZnO-MgO phase diagram. (letter to the editor)

Availability note (English)

Available online at http://stacks.iop.org/0953-8984/15/L475/c330l2.pdf or at the Web site for the Journal of Physics. Condensed Matter (ISSN 1361-648X) http://www.iop.org/

Additional details

Publishing Information

Journal Title
Journal of Physics. Condensed Matter
Journal Volume
15
Journal Issue
30
Journal Page Range
p. L475-L482
ISSN
0953-8984
CODEN
JCOMEL