Published May 29, 2015 | Version v1
Journal article

Optical and electrical properties of structured multilayer with tunable transparency rate

  • 1. Aix-Marseille University, Institut Matériaux Microélectronique Nanosciences de Provence-IM2NP, CNRS-UMR 7334, Domaine Universitaire de Saint-Jérôme, Service 231, 13 397 Marseille Cedex 20 (France)
  • 2. CROSSLUX, Immeuble CCE, Avenue Georges Vacher, ZI Rousset Peynier, 13 106 Rousset Cedex (France)
  • 3. I.E.M.N., CNRS-UMR 8520, Cité Scientifique, Avenue Poincaré, 59652 Villeneuve d'Ascq (France)

Description

An experimental study has been carried out on structured multilayer with tunable transparency rate. In this paper, we present the optical and electrical characterization of an oxide | metal | oxide structured electrode manufactured by e-beam deposition and patterned by a lift-off process. The obtained samples are made of grids with different geometrical parameters that lead to varying surface coverage rate on glass. The electrical and optical parameters of SnOx|Ag|SnOx grids are investigated to determine the efficiency, sustainability and limitations of such structures. A linear relationship between the transmittance of the electrodes and the increase of the surface coverage rate is obtained. Coupled to an optimization process, we are able to define a high transparency in a chosen spectral range. Electrical results show a relative stability of the resistivity from 2.9   ×   10  −  4 Ω.cm for an as-grown electrode to 5.6   ×   10  −  4 Ω.cm for a structured electrode with a surface coverage rate of 59%. (paper)

Availability note (English)

Available from http://dx.doi.org/10.1088/0022-3727/48/20/205102

Additional details

Publishing Information

Journal Title
Journal of Physics. D, Applied Physics
Journal Volume
48
Journal Issue
20
Journal Page Range
[6 p.]
ISSN
0022-3727
CODEN
JPAPBE

INIS

Country of Publication
United Kingdom
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
47068666
Subject category
S71: CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS;
Descriptors DEI
DEPOSITION; ELECTRICAL PROPERTIES; ELECTRON BEAMS; GLASS; GRIDS; LAYERS; OPACITY; OPTIMIZATION; OXIDES; STABILITY; SURFACES
Descriptors DEC
BEAMS; CHALCOGENIDES; ELECTRODES; LEPTON BEAMS; OPTICAL PROPERTIES; OXYGEN COMPOUNDS; PARTICLE BEAMS; PHYSICAL PROPERTIES