Study of reducing excimer laser bandwidth by intracavity titling etalons

The authors studied reducing laser bandwidth by intracavity etalons, and discussed several factors which would affect the experimental result. The experiment research on a discharge pumped, long pulse duration KrF excimer laser was done, in which three etalons provided spectral dispersion. In the experiments, the influence of the apertures and the rate of output coupling was studied. By selecting suitable parameters, output linewidth no more than 3 GHz has been got, this value is 1000 times smaller than the linewidth during free running