Published November 1993 | Version v1
Journal article Metadata-only

Liquid metal ion sources

Creators

  • 1. Technical Univ. of Wroclaw (Poland). Inst. of Electron Technology

Description

Liquid metal ion sources are widely used in focused ion beam processing for applications to surface research and microfabrication technology. This paper presents a brief review of the basic phenomena, their mechanisms, parameters and properties of liquid metal ion sources. The material and design problems are also discussed. (author)

Additional details

Publishing Information

Journal Title
Vacuum
Journal Volume
44
Journal Issue
11-12
Journal Page Range
p. 1095-1099.
ISSN
0042-207X
CODEN
VACUAV

Conference

Title
7. international school on vacuum, electron and ion technologies.
Dates
23-27 Sep 1991.
Place
Plovdiv (Bulgaria).

INIS

Country of Publication
United Kingdom
Country of Input or Organization
United Kingdom
INIS RN
25012070
Subject category
S71: CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS;
Resource subtype / Literary indicator
Conference
Descriptors DEI
BEAM CURRENTS; FABRICATION; FOCUSING; ION BEAMS; ION SOURCES; LIQUID METALS; REACTION KINETICS; SEMICONDUCTOR DEVICES
Descriptors DEC
BEAMS; CURRENTS; ELEMENTS; FLUIDS; KINETICS; LIQUIDS; METALS