Published May 2002 | Version v1
Journal article

Ion beam induced charge characterisation of a silicon microdosimeter using a heavy ion microprobe

Description

An ion beam induced charge (IBIC) facility has been added to the existing capabilities of the ANSTO heavy ion microprobe and the results of the first measurements are presented. Silicon on insulator (SOI) diode arrays with microscopic junction sizes have recently been proposed as microdosimeters for hadron therapy. A 20 MeV carbon beam was used to perform IBIC imaging of a 10 μm thick SOI device

Additional details

Identifiers

PII
S0168583X01013167;

Publishing Information

Journal Title
Nuclear Instruments and Methods in Physics Research. Section B, Beam Interactions with Materials and Atoms
Journal Volume
190
Journal Issue
1-4
Journal Page Range
p. 335-338
ISSN
0168-583X
CODEN
NIMBEU

INIS

Country of Publication
Netherlands
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
33062587
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Descriptors DEI
CARBON IONS; CHARGE COLLECTION; ION BEAMS; ION MICROPROBE ANALYSIS; SEMICONDUCTOR DEVICES; SEMICONDUCTOR JUNCTIONS; SILICON
Descriptors DEC
BEAMS; CHARGED PARTICLES; CHEMICAL ANALYSIS; ELEMENTS; IONS; MICROANALYSIS; NONDESTRUCTIVE ANALYSIS; SEMIMETALS

Optional Information

Copyright
Copyright (c) 2002 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.