Published 1900 | Version v1
Book Metadata-only

Study of the sputtering conditions in the glow discharge spectral analysis

Creators

  • 1. Institut de Recherches de la Siderurgie Francaise (IRSID), 78 - Saint-Germain-en-Laye

Description

The crater profile formed by glow discharge was found to be sensitive to voltage. The penetration rate and the sputtering efficiency were calculated. Informations concerning the depth resolution are given

Abstract (French)

On a trouve que le profil du cratere forme par decharge luminescente etait sensible au voltage. On a calcule la vitesse de penetration et le rendement de la pulverisation. On donne des informations sur la resolution en profondeur

Additional details

Additional titles

Original title (French)
Etude des conditions d'erosion au cours de l'analyse spectrale a l'aide de la source a decharge luminescente

Publishing Information

Publisher
GAMS.
Imprint Place
Paris
Imprint Title
18. Colloquium spectroscopicum internationale. Grenoble, 15-19 September 1975
Imprint Pagination
v. 1 p. 268-272.

Conference

Title
18. Colloquium spectroscopicum internationale.
Dates
15 Sep 1975.
Place
Grenoble, France.

INIS

Country of Publication
France
Country of Input or Organization
France
INIS RN
7250794
Subject category
S37: INORGANIC, ORGANIC, PHYSICAL AND ANALYTICAL CHEMISTRY;
Resource subtype / Literary indicator
Conference
Descriptors DEI
CATHODE SPUTTERING; EROSION; GLOW DISCHARGES; QUANTITATIVE CHEMICAL ANALYSIS; STEELS
Descriptors DEC
ALLOYS; CARBON ADDITIONS; CHEMICAL ANALYSIS; ELECTRIC DISCHARGES; IRON ALLOYS; IRON BASE ALLOYS; SPUTTERING; TRANSITION ELEMENT ALLOYS