The Radio-Frequency Capacitive Normal Glow Discharge in Axial Magnetic Field

A numerical model of a normal axisymmetric high-frequency capacitive glow discharge in an axial magnetic field is considered. The analysis of previous investigations on α- and γ-forms of high-frequency discharges was performed. Using the author's created numerical model, a study of the electrodynamic structure of a normal high-frequency axially symmetric glow discharge was performed with the following parameters: distance between electrodes of H = 2 cm, pressure of p = 5 Torr, amplitude voltage drop on the inter-electrode gap of E₀ = 460 and 478 V, coefficient of the secondary ion-electron coefficient emissions of γ = 0.33. The two-dimensional electrodynamic structure of the γ-form of the high-frequency glow discharge was studied without and with an axial magnetic field induction of B _x = 0.1 T. A qualitative explanation of the reasons for the radial expansion of the current channel of a high-frequency discharge in a normal mode is given. (paper)