Published May 2015 | Version v1
Miscellaneous Open

Quantitative Characterization of Boron in BGaAs Nano-Films Using PIGE Technique

  • 1. Lebanese Atomic Energy Commission-CNRS P.O. Box 11-8281, Riad El Solh 1107 2260 Beirut (Lebanon)

Description

In this work, the capability of the proton Induced γ-ray Emission (PIGE) technique to monitor a rapid, nondestructive and quantification of Boron in ultra-thin films of BxGa1-xAs deposited on GaAs substrate using MOCVD is discussed. In order to improve the sensitivity for B detection, a systematic study was undertaken using Proton-Induced beam at three different energies (from 1.7, 2.4 and 3 MeV) with different tilting angles (0, 60° and 80°). Best conditions were found to be at 1.7 MeV and at 80° for proton energy and tilting angle within ten minutes of acquisition time

Files

48069793.pdf

Files (471.8 kB)

Name Size Download all
md5:ad28c3f9fb70c69d74a1640cfdd569cb
471.8 kB Preview Download
Part of:
Proceedings of the 12th Arab Conference on the Peaceful Uses of Atomic Energy

Additional details

Publishing Information

Imprint Title
Proceedings of the 12th Arab Conference on the Peaceful Uses of Atomic Energy
Imprint Pagination
1081 p.
Journal Page Range
p. 77-82
Report number
INIS-EG--537

Conference

Title
12. Arab Conference on the Peaceful Uses of Atomic Energy
Dates
16-20 May 2015
Place
Sharm El Sheikh (Egypt)

Optional Information