Published 1988
| Version v1
Book
High energy ion beam annealing in implanted CdTe
- 1. Oak Ridge National Lab., Oak Ridge, TN (USA)
- 2. Massachusetts Institute of Technolgy, Cambridge, MA (USA)
Description
In this paper the annealing effects of a high energy beam of Cu ions on implanted CdTe crystals are studied. Single crystals of CdTe have been implanted with Eu (energy 60 keV, fluence 1 x 1016 cm-2) at substrate temperatures of 250C, and 4000C. Lattice damage introduced by the implantation process was measured by Rutherford backscattering. The samples were then implanted with high energy Cu ions (energy 3.5 MeV, fluence 0.5 x 1016 cm-2) at substrate temperatures of 250C and 2000C. Channeling spectra from these samples indicate a reduction in the near-surface lattice damage as a result of the Cu implantation that can be unambiguously separated from the external heating of the substrate
Additional details
Publishing Information
- Publisher
- Materials Research Society.
- Imprint Place
- Pittsburgh, PA (USA)
- ISBN
- 0-931837-68-5
- Imprint Title
- Fundamentals of beam-solid interactions and transient thermal processing
- Imprint Pagination
- 763 p.
- Series
- Materials Research Society symposium proceedings. Volume 100.
- Journal Page Range
- p. 305-310.
Conference
- Title
- Symposium on fundamentals of beam-solid interactions and transient thermal processing.
- Dates
- 30 Nov - 3 Dec 1987.
- Place
- Boston, MA (USA).
INIS
- Country of Publication
- United States
- Country of Input or Organization
- United States
- INIS RN
- 21018507
- Subject category
- S36: MATERIALS SCIENCE; S37: INORGANIC, ORGANIC, PHYSICAL AND ANALYTICAL CHEMISTRY;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- ANNEALING; ATOM TRANSPORT; BEAM OPTICS; CADMIUM TELLURIDES; COPPER IONS; EUROPIUM; ION CHANNELING; ION IMPLANTATION; MONOCRYSTALS; RUTHERFORD SCATTERING
- Descriptors DEC
- ATOMIC IONS; CADMIUM COMPOUNDS; CHALCOGENIDES; CHANNELING; CHARGED PARTICLES; CRYSTALS; ELASTIC SCATTERING; ELEMENTS; HEAT TREATMENTS; IONS; METALS; NEUTRAL-PARTICLE TRANSPORT; RADIATION TRANSPORT; RARE EARTHS; SCATTERING; TELLURIDES; TELLURIUM COMPOUNDS
Optional Information
- Secondary number(s)
- CONF-8711126--.