Published February 10, 2003
| Version v1
Journal article
Vertically aligned carbon nanofibers as sacrificial templates for nanofluidic structures
Creators
- 1. Molecular-Scale Engineering and Nanoscale Technologies Research Group, Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831 (United States)
- 2. Condensed Matter Sciences Division, Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831 (United States)
- 3. Life Sciences Division, Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831 (United States)
- 4. School of Applied and Engineering Physics, Cornell University, Ithaca, New York 14853 (United States)
Description
We report a method to fabricate nanoscale pipes ('nanopipes') suitable for fluidic transport. Vertically aligned carbon nanofibers grown by plasma-enhanced chemical vapor deposition are used as sacrificial templates for nanopipes with internal diameters as small as 30 nm and lengths up to several micrometers that are oriented perpendicular to the substrate. This method provides a high level of control over the nanopipe location, number, length, and diameter, permitting them to be deterministically positioned on a substrate and arranged into arrays
Additional details
Identifiers
- DOI
- 10.1063/1.1544058;
Publishing Information
- Journal Title
- Applied Physics Letters
- Journal Volume
- 82
- Journal Issue
- 6
- Journal Page Range
- p. 976-978
- ISSN
- 0003-6951
- CODEN
- APPLAB
INIS
- Country of Publication
- United States
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 35041612
- Subject category
- S36: MATERIALS SCIENCE; S71: CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS;
- Descriptors DEI
- CARBON FIBERS; CHEMICAL VAPOR DEPOSITION; FABRICATION; FLUIDIC DEVICES; NANOTUBES; PLASMA
- Descriptors DEC
- CHEMICAL COATING; DEPOSITION; FIBERS; NANOSTRUCTURES; SURFACE COATING
Optional Information
- Notes
- (c) 2003 American Institute of Physics.