Solid Sample Of Hot Cathode Ion Source With Integrated Filament And Oven

At room temperature most substances are at solid phase, therefore ion implantation requires a solid sample of ion source. An investigation on fabrication of a solid sample of hot cathode ion source with integrated filament and oven was carried out. The instruments consist of some electrodes: a filament which is also an oven, an anode, a repeller, a slit, a focussing and a magnet. Ionization was done by ionizing electrons radiated by filament on solid atoms evaporated by oven. The advantage of using integrated filament and oven was that it saved a feed through and a power supply. Testing was carried out by measuring output ion current as a function of filament current, anode, repeller-slit and focussing potentials and a magnetic field intensity. Experimental results showed that this type of ion source could be used for solids having boiling temperature at a pressure of 1E-3 torr of a working temperature of filament (1.500oC) and at an operating conditions of: 10 A filament current and 2.200 volt repeller-slit potential could give output ion current of 1 μA for aluminium, copper and iron samples