A novel technique for processing functionally graded HA coatings

Hydroxyapatite (HA) films were deposited using dual ion beam sputtering. Deposition was carried out with an in situ heat treatment at three temperature settings during deposition. X-ray diffraction of the films at the surface revealed that the deposited film is composed of hydroxyapatite crystalline and amorphous phases. Cross-sectional transmission electron microscopy analysis displayed that the films have a graded crystal structure with the crystalline layer near the substrate and the amorphous layer at the top surface. Compositional analysis was performed using SEM-EDX at the top surface as well as STEM-EDX at the cross-section of the film. The average calcium to phosphorous ratio at the surface is 1.46, obtained by SEM-EDX. The Ca/P ratios in the crystalline and amorphous layers of the film are 1.6 to 1.7, close to the ratio of 1.67 for HA