Published 2010
| Version v1
Miscellaneous
Modification of thin Be, Si, Al, Ti, Zr, W oxide films at irradiation by He+ and Ar+ ion beams with wide energy spectrum
Description
no abstract available
Additional details
Additional titles
- Original title (Russian)
- Модифицирование тонких оксидных пленок Бе, Си, Ал, Ти, Зр, W при облучении пучками ионов Хе
Publishing Information
- Publisher
- Universitetskaya kniga
- Imprint Place
- Moscow (Russian Federation)
- Imprint Title
- Summaries of reports of 40th International conference on physics of interactions of charged particles with crystals
- Imprint Pagination
- 226 p.
- Journal Page Range
- p. 157
- Report number
- INIS-RU--527
Conference
- Title
- 40. International conference on physics of interaction of charged particles with crystals
- Original Conference Title
- XL mezhdunarodnaya konferentsiya po fizike vzaimodejstviya zaryazhennykh chastits s kristallami
- Dates
- 25-27 May 2010
- Place
- Moscow (Russian Federation)
INIS
- Country of Publication
- Russian Federation
- Country of Input or Organization
- Russian Federation
- INIS RN
- 43032879
- Subject category
- S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- No Abstract, Conference, Numerical Data
- Descriptors DEI
- ALUMINIUM OXIDES; ARGON IONS; BERYLLIUM OXIDES; DEPTH; EXPERIMENTAL DATA; HELIUM IONS; ION BEAMS; ION IMPLANTATION; KEV RANGE 10-100; PHYSICAL RADIATION EFFECTS; PHYSICAL VAPOR DEPOSITION; SILICON OXIDES; SPATIAL DISTRIBUTION; SPATIAL RESOLUTION; THIN FILMS; TITANIUM OXIDES; VACUUM COATING; ZIRCONIUM OXIDES
- Descriptors DEC
- ALKALINE EARTH METAL COMPOUNDS; ALUMINIUM COMPOUNDS; BEAMS; BERYLLIUM COMPOUNDS; CHALCOGENIDES; CHARGED PARTICLES; DATA; DEPOSITION; DIMENSIONS; DISTRIBUTION; ENERGY RANGE; FILMS; INFORMATION; IONS; KEV RANGE; NUMERICAL DATA; OXIDES; OXYGEN COMPOUNDS; RADIATION EFFECTS; RESOLUTION; SILICON COMPOUNDS; SURFACE COATING; TITANIUM COMPOUNDS; TRANSITION ELEMENT COMPOUNDS; ZIRCONIUM COMPOUNDS
Optional Information
- Notes
- 3 refs. Imprint:Tezisy dokladov 40. mezhdunarodnoj konferentsii po fizike vzaimodejstviya zaryazhennykh chastits s kristallami