Field emission from graphene sheets and its application in floating gate memories
Creators
- 1. Georgia Institute of Technology, Atlanta, GA, 30332 (United States)
- 2. Harper Semi, Atlanta, GA, 30332 (United States)
Description
The potential performance of 2D NAND flash with a graphene floating gate (FG) layer is presented. The field enhancement factor for patterned CVD graphene sheets atop a tunneling dielectric is experimentally extracted and used to drive higher-level circuit simulations on 64-bit NAND strings. The average field enhancement factor at a barrier height of 3.1 eV was found to be ∼2.85 with a maximum value of 4. Our modest extracted β value explains the contradiction in prior experiments that reported a field enhancement factor of few thousands but only 30%–40% improvement in the write voltage of FG memory devices. Design and operational tradeoffs are benchmarked based on these experimental values and it is shown that 2D NAND programming time and/or programming voltage can be suppressed to 10 ns and 5 V, respectively, based on a 65 nm process node. The onset of read disturbs from the more efficient FG layer are identified and shown to be easily mitigated through error correction code. (paper)
Availability note (English)
Available from http://dx.doi.org/10.1088/1361-6641/aae626Additional details
Identifiers
Publishing Information
- Journal Title
- Semiconductor Science and Technology
- Journal Volume
- 33
- Journal Issue
- 12
- Journal Page Range
- [7 p.]
- ISSN
- 0268-1242
- CODEN
- SSTEET
INIS
- Country of Publication
- United Kingdom
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 52034598
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; S77: NANOSCIENCE AND NANOTECHNOLOGY;
- Descriptors DEI
- BENCHMARKS; CHEMICAL VAPOR DEPOSITION; COMPUTERIZED SIMULATION; DESIGN; DIELECTRIC MATERIALS; FIELD EMISSION; GRAPHENE; LAYERS; MEMORY DEVICES; TUNNEL EFFECT
- Descriptors DEC
- CARBON; CHEMICAL COATING; DEPOSITION; ELEMENTS; EMISSION; MATERIALS; NONMETALS; SIMULATION; SURFACE COATING