Published December 1, 2018 | Version v1
Journal article

Field emission from graphene sheets and its application in floating gate memories

  • 1. Georgia Institute of Technology, Atlanta, GA, 30332 (United States)
  • 2. Harper Semi, Atlanta, GA, 30332 (United States)

Description

The potential performance of 2D NAND flash with a graphene floating gate (FG) layer is presented. The field enhancement factor for patterned CVD graphene sheets atop a tunneling dielectric is experimentally extracted and used to drive higher-level circuit simulations on 64-bit NAND strings. The average field enhancement factor at a barrier height of 3.1 eV was found to be ∼2.85 with a maximum value of 4. Our modest extracted β value explains the contradiction in prior experiments that reported a field enhancement factor of few thousands but only 30%–40% improvement in the write voltage of FG memory devices. Design and operational tradeoffs are benchmarked based on these experimental values and it is shown that 2D NAND programming time and/or programming voltage can be suppressed to 10 ns and 5 V, respectively, based on a 65 nm process node. The onset of read disturbs from the more efficient FG layer are identified and shown to be easily mitigated through error correction code. (paper)

Availability note (English)

Available from http://dx.doi.org/10.1088/1361-6641/aae626

Additional details

Identifiers

Publishing Information

Journal Title
Semiconductor Science and Technology
Journal Volume
33
Journal Issue
12
Journal Page Range
[7 p.]
ISSN
0268-1242
CODEN
SSTEET