Micromanipulation transfer of membrane resonators for circuit optomechanics

A capacitive coupling between mechanical resonator and a microwave cavity enables readout and manipulation of the vibrations. We present a set-up to carry out such experiments with aluminum membranes fabricated as stamps and transferred in place with micromanipulation. The membrane is held in place by van der Waals forces, and is supported by three microscopic points. We measure the lowest mechanical modes, and conclude the membrane vibrates as an essentially free–free resonator. Sliding clamping conditions are identified via a softening Duffing nonlinearity. The method will enable reduction of clamping losses, while maintaining a narrow vacuum gap for strong capacitive coupling. (paper)