Development of Hybrid Coating Process by Ion Beam Sputter Deposition

Korea Multi Purpose Accelerator Complex developed a proton-proton accelerator and beam utilization technologies through the last 10 years based Proton Engineering Frontier Project. Through the research and development over 10 years, we obtained a low-energy ion beam application technology derived from the accelerator technology, and also we obtained various types of high-current ion source device technology derived from ion source of proton Accelerator. This Project will obtain the core technology by combining the coating process with our high-current ion source device technology. The coating process using an ion beam were a IBED (Ion Beam Enhanced Deposition), IBM (Ion Beam Mixing), IBAD (Ion Beam Assisted Deposition), IBSD (Ion Beam Sputter Deposition) etc. These technology has developed by active research and development in advanced country, but domestic country is lacking a foundation based research. In this project, to solve the problem of alloy coating, low deposition rate, low adhesion of the conventional coating process, we will develop the new coating process by using Ion Beam Sputter Deposition. As a result, we will obtained the core technology and apply the industrial applications.