Published July 2016 | Version v1
Journal article Metadata-only

Development of a fluorescence based flux sensor for thin film growth and nanoparticle deposition

Creators

  • 1. Department of Physics and Astronomy, KU Leuven, Celestijnenlaan 200D, BE-3001 Leuven (Belgium)
  • 2. DCA Instruments, 20360 Turku (Finland)
  • 3. Kemstream, 34055 Montpellier (France)
  • 4. Department of Materials Engineering, KU Leuven, Kasteelpark Arenberg 44 bus 2450, BE-3001 Leuven (Belgium)

Description

An optical flux sensor, based on the fluorescence properties of materials and nanoparticles, has been developed to control the deposition rate in thin film deposition systems. Using a simple diode laser and a photomultiplier tube with a light filter, we report the detection of gallium atoms and CdSe-ZnS quantum dots. This setup has a high sensitivity and reproducibility.

Additional details

Identifiers

DOI
10.1063/1.4958823;

Publishing Information

Journal Title
Review of Scientific Instruments
Journal Volume
87
Journal Issue
7
Journal Page Range
vp.
ISSN
0034-6748
CODEN
RSINAK

INIS

Country of Publication
United States
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
48042472
Subject category
S46: INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Descriptors DEI
CADMIUM SELENIDES; DEPOSITION; DIODE-PUMPED SOLID STATE LASERS; FILTERS; FLUORESCENCE; GALLIUM; NANOPARTICLES; PHOTOMULTIPLIERS; QUANTUM DOTS; SENSITIVITY; SENSORS; THIN FILMS; TUBES; ZINC SULFIDES
Descriptors DEC
CADMIUM COMPOUNDS; CHALCOGENIDES; ELEMENTS; EMISSION; FILMS; INORGANIC PHOSPHORS; LASERS; LUMINESCENCE; METALS; NANOSTRUCTURES; PARTICLES; PHOSPHORS; PHOTON EMISSION; PHOTOTUBES; SELENIDES; SELENIUM COMPOUNDS; SOLID STATE LASERS; SULFIDES; SULFUR COMPOUNDS; ZINC COMPOUNDS

Optional Information

Notes
(c) 2016 Author(s)