Reduction of vibration for feed drive system using linear motor at high-speed driving

In all ages it is always required to improve the high speed and high accuracy for machine tools. In the field of machining, processing methods using lasers etc. have developed in recent years. As a result, it began to hear the request to operate a moving part that does not have so large mass at high speed. The feed drive system using a linear motor has focus as the device that satisfies this requirement. In generally, the trapezoidal acceleration/deceleration is used for the feed motion of machine tools, but there are not many researches quantitatively showing the relationship between acceleration/deceleration shape and machine vibration. In this study, the feed drive system using the linear motor was driven by trapezoidal and S-curve acceleration/deceleration exceeding 1 G, the acceleration method is evaluated by comparing the deviation, the maximum speed, and the maximum acceleration at that time. (paper)