Contactless method for studying the parameters of the near electrode region of an RF discharge

One proposes a contactless nondisturbing method to investigate into parameters of low-pressure space RF-discharge near-the-electrode region by measuring quasi-stationary and alternating voltages in circuit elements followed by calculation on the basis of the derived ratios of electrostatic potential abrupt change in near-the-electrode layer of a space discharge to layer thickness. In contactless near-the-electrode layer one determines, as well, density of current of positive charges to electrode and concentration of charges at plasma boundary. One validates experimentally the efficiency of the method in a space RF-discharge with internal and external electrodes