Spectroscopy of highly charged ion with an EBIT

The spectroscopic investigation extreme ultraviolet (EUV) radiation is very important for determination of properties and mechanism of astrophysical and laboratory fusion plasma, such as density, temperature, charge distribution, heating and cooling etc. The EUV wavelength range contains emission line of the L-shells of highly charged ion of low- and medium-Z elements as well as of the M-shells of HCI for high-Z elements. We measured the EUV spectra (100-300A) of highly charged iron ion with flat-field grazing-incidence (3deg) grating (1200/mm) spectrometer mounted at the Tokyo-EBIT. The electron energy ranges are from 2.2 keV to 300 eV. We compared this EBIT spectrum with LHD spectrum and found a difference. (author)