Published October 1, 1981 | Version v1
Journal article

Techniques and equipment for non-semiconductor application of ion implantation

  • 1. UKAEA Atomic Energy Research Establishment, Harwell

Description

Ion implantation is now being applied successfully to the treatment of engineering tools and components in order to improve their resistance to wear, fatigue and oxidation. Examples are given to show the effectiveness of the process in steels, chromium, cemented carbides and titanium alloys. These applications have led to the development of a new range of equipment to provide the necessary high beam currents and versatile work-handling facilities. The process of bombardment-diffused coating (BDC), by which a thin metallic coating is caused to diffuse into the substrate under ion bombardment, is providing new possibilities for tailoring the surface properties of materials to meet arduous conditions. (orig.)

Additional details

Publishing Information

Journal Title
Nucl. Instrum. Methods Phys. Res.
Journal Volume
189
Journal Issue
1
Series
Nucl. Instrum. Methods Phys. Res.
Journal Page Range
117-132
ISSN
0029-554X

Conference

Title
3. international conference on ion implantation equipment and techniques.
Dates
8 - 11 Jul 1980.
Place
Kingston, Canada.

INIS

Country of Publication
Netherlands
Country of Input or Organization
Netherlands
INIS RN
13659463
Subject category
S07: ISOTOPES AND RADIATION SOURCES;
Resource subtype / Literary indicator
Conference, Progress Report
Descriptors DEI
BEAM CURRENTS; CARBIDES; CHROMIUM; DIFFUSION COATINGS; FATIGUE; ION BEAMS; ION IMPLANTATION; MATERIALS HANDLING; OXIDATION; STEELS; TITANIUM ALLOYS; WEAR
Descriptors DEC
ALLOYS; BEAMS; CARBON ADDITIONS; CARBON COMPOUNDS; CHEMICAL REACTIONS; COATINGS; CURRENTS; ELEMENTS; IRON ALLOYS; IRON BASE ALLOYS; MECHANICAL PROPERTIES; METALS; TRANSITION ELEMENT ALLOYS; TRANSITION ELEMENTS