Published 1997 | Version v1
Journal article Metadata-only

The role of hydrogen ions in diamond layers preparation by means of MW (ECR) CVD

Creators

  • 1. wydzial Elektroniki, Telekomunikacji i Informatyki, Politechnika Gdanska, Gdansk (Poland)

Description

no abstract available

Additional details

Additional titles

Original title (Polish)
Rola jonow wodorowych w procesie syntezy warstw diamentowych metoda MW (ECR) CVD

Publishing Information

Journal Title
Prace ITME
Journal Issue
no.49
Journal Page Range
p. 180-182
ISSN
0209-0066

Conference

Title
2. Seminar on Electronic Materials Engineering organized under auspices of Committee of Scientific Research
Original Conference Title
2. Seminarium Inzynieria Materialow Elektronicznych zorganizowane pod patronatem Komitetu Badan Naukowych
Dates
16 Dec 1997
Place
Warsaw (Poland)

INIS

Country of Publication
Poland
Country of Input or Organization
Poland
INIS RN
30008904
Subject category
S36: MATERIALS SCIENCE;
Resource subtype / Literary indicator
Conference, No Abstract
Descriptors DEI
CHARGE CARRIERS; CRYSTAL GROWTH; DIAMONDS; HYDROGEN IONS; MEETINGS; THIN FILMS; VAPOR PHASE EPITAXY
Descriptors DEC
CARBON; CHARGED PARTICLES; CRYSTAL GROWTH METHODS; ELEMENTS; EPITAXY; FILMS; IONS; MINERALS; NONMETALS

Optional Information

Contract/Grant/Project number
KBN grant no. 3 P407 081 06