Published 1975 | Version v1
Report Metadata-only

Ion implantation in semiconductors

Creators

  • 1. Max-Planck-Institut fuer Kernphysik, Heidelberg (F.R. Germany)

Description

The most important aspects of ion implantation in semiconductor materials (especially silicon and germanium) are discussed: range-energy relations, aims of ion implantation in semiconductors, radiation damage, electrical properties, radiation induced diffusion, and material transformations. Finally, some examples of the application of ion implantation for the production of semiconductor radiation detectors are reported on. (GSCH)

Abstract (German)

Die wichtigsten Aspekte der Ionenimplantation in Halbleitermaterialien (speziell Silizium und Germanium) werden diskutiert: Energie-Reichweite-Beziehungen, Ziele der Ionenimplantation in Halbleitern, Strahlenschaeden, elektrische Eigenschaften, strahlungsbeschleunigte Diffusion und Stoffumwandlungen. Schliesslich werden einige Anwendungsbeispiele der Ionenimplantation auf die Herstellung bestimmter Halbleiter-Strahlungsdetektoren mitgeteilt. (GSCH)

Additional details

Additional titles

Original title (German)
Ionenimplantation in Halbleitern

Publishing Information

Imprint Title
GSI symposium
Imprint Pagination
p. 42-53.
Report number
GSI-P--2-75

Conference

Title
GSI symposium on heavy ions - a tool of solid state physics.
Dates
19 Jun 1975.
Place
Darmstadt, F.R. Germany.

INIS

Country of Publication
Germany
Country of Input or Organization
Germany
INIS RN
7261762
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; S36: MATERIALS SCIENCE;
Resource subtype / Literary indicator
Conference
Descriptors DEI
ANNEALING; CARRIER DENSITY; CRYSTAL DOPING; DIFFUSION; GERMANIUM; ION BEAMS; ION IMPLANTATION; MICROSTRUCTURE; PHYSICAL RADIATION EFFECTS; SEMICONDUCTOR DETECTORS; SEMICONDUCTOR MATERIALS; SILICON
Descriptors DEC
BEAMS; CRYSTAL STRUCTURE; ELEMENTS; HEAT TREATMENTS; MEASURING INSTRUMENTS; METALS; RADIATION DETECTORS; RADIATION EFFECTS; SEMIMETALS

Optional Information

Notes
18 figs.; 2 tabs.; 18 refs.
Secondary number(s)
AED-Conf--75-732-007.