Published June 1980 | Version v1
Report Open

Modified thin film processing sequence

Creators

Description

A modified thin film processing sequence in which tantalum nitride (TA2N) resistors are stabilized prior to chromium/gold (Cr/Au) evaporation was investigated, and the effects of subsequent processing on unstabilized Cr/Au films were determined. Thin films evaporated using the modified process yielded results similar to those of films evaporated using the standard processing techniques. Work on the modified process was discontinued because of some metallization adhesion failures at the Cr/Au-to-Ta2N interface, higher contact resistance, and the additional steps required in processing

Availability note (English)

MF available from INIS under the Report Number; Available from NTIS., PC A02/MF A01.

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Additional details

Publishing Information

Imprint Pagination
20 p.
Report number
BDX--613-2409

INIS

Country of Publication
United States
Country of Input or Organization
United States
INIS RN
12588548
Subject category
S42: ENGINEERING;
Descriptors DEI
CHROMIUM; DEPOSITION; EVAPORATION; FABRICATION; FILMS; GOLD; MICROELECTRONIC CIRCUITS; RESISTORS; STABILITY; TANTALUM NITRIDES
Descriptors DEC
ELECTRICAL EQUIPMENT; ELECTRONIC CIRCUITS; ELEMENTS; METALS; NITRIDES; NITROGEN COMPOUNDS; PHASE TRANSFORMATIONS; TANTALUM COMPOUNDS; TRANSITION ELEMENT COMPOUNDS; TRANSITION ELEMENTS