Published 2008
| Version v1
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Sputtering of Ti Target with Medium Energy Ar+ Beam
- 1. Institute of Physics, Maria Curie-Sklodowska University, Lublin (Poland)
- 2. Institute of Atomic Energy, Otwock-Swierk (Poland)
- 3. Institute of Computer Science, Maria Curie-Sklodowska University, Lublin (Poland)
Description
no abstract available
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39101926.pdf
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Additional details
Publishing Information
- Imprint Place
- Otwock-Swierk (Poland)
- Imprint Title
- Annual Report 2007
- Imprint Pagination
- 141 p.
- Journal Page Range
- p. 75
- ISSN
- 1507-5478
- Report number
- INIS-PL--2008-0014
INIS
- Country of Publication
- Poland
- Country of Input or Organization
- Poland
- INIS RN
- 39101926
- Subject category
- S46: INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY;
- Resource subtype / Literary indicator
- No Abstract, Progress Report
- Descriptors DEI
- ARGON IONS; ELECTRON EMISSION; ENERGY SPECTRA; ION EMISSION; ION SOURCES; KEV RANGE 10-100; PROGRESS REPORT; SPUTTERING; TARGETS; TITANIUM
- Descriptors DEC
- CHARGED PARTICLES; DOCUMENT TYPES; ELEMENTS; EMISSION; ENERGY RANGE; IONS; KEV RANGE; METALS; SPECTRA; TRANSITION ELEMENTS
Optional Information
- Notes
- 3 refs., 4 figs.