Published April 4, 1984 | Version v1
Patent Metadata-only

Chemically resistant, biocompatible and microstructured surface protection

Creators

Description

Subject of the invention are chemicallly resistant, biocompatible, and microstructured surface protective coatings of electronic elements and sensors including chemical sensors. Such coatings consist of a radiation-modified organic substance made of a microlithographic material. Modification can be achieved by irradiation with ions, atoms or molecules having an energy between 1 KeV and 1 MeV and a flux between 1013 and 1018 particles per cm2

Availability note (English)

Available from BUCHEXPORT, DDR-7010 Leipzig.

Additional details

Additional titles

Original title (German)
Chemisch resistenter, biovertraeglicher und mikrostrukturierbarer Oberflaechenschutz

Publishing Information

Imprint Pagination
vp.
IPC:
Int. Cl. H01l21/56; H01l23/30.
IPC
Int. Cl. H01l21/56; H01l23/30.
Patent number
DD patent document 208704/A/

INIS

Country of Publication
German Democratic Republic
Country of Input or Organization
German Democratic Republic
INIS RN
15048586
Subject category
S38: RADIATION CHEMISTRY, RADIOCHEMISTRY AND NUCLEAR CHEMISTRY;
Resource subtype / Literary indicator
Non-conventional Literature
Descriptors DEI
COATINGS; CORROSION PROTECTION; ELECTRONIC CIRCUITS; PARTICLE BEAMS; POLYMERS; RADIATION CURING
Descriptors DEC
BEAMS; CHEMICAL RADIATION EFFECTS; CURING; RADIATION EFFECTS