Facilitating the identification of solid state phases and concentrations in micro-volumes

The identification of solid state phases and concentrations in volumes of micron and sub-micron dimensions is of increasing importance in many fields of study, of which the physics of semiconductor integrated circuit technology is typical. In this dissertation techniques which were developed to facilitate such identification using two basic characterization techniques are described. The first basic characterization technique entails the determination of phase in micro-volumes using the transmission electron microscope, where only microscopic areas of fine-grained specimens are often available for analysis. A further facilitation of phase and concentration determination entailed the development of a micro-Rutherford backscattering spectrometry capability on the Faure nuclear microprobe. 45 refs., 109 figs