Low Temperature Sintering of PZT
- 1. University of Freiburg, Department of Microsystems Engineering, IMTEK, Georges- Koehler-Allee 102, 79110 Freiburg (Germany)
Description
This paper describes the fabrication and characterization of lead zirconate titanate (PZT) films fired in a liquid-phase sintering process at 900 °C in air. In detail the manufacturing of piezoelectric multilayers with internal pure silver (Tm = 961 °C) electrodes are reported. The feasibility of ten sintering aids in two different volume fractions was investigated for a commercial hard PZT powder (PIC 181, PI Ceramics) with respect to density, microstructure, mechanical behaviour, and piezoelectric properties. Li2O, Li2CO3, PbO, MnO2, V2O5, CuO, Bi2O3, the eutectic mixtures Cu2O·PbO and PbO·WO3 and the ternary system Li2CO3·Bi2O3·CuO (LBCu) have been tested as liquid phase sintering aids. The combination of PZT with LBCu showed the best results. With 5 vol.% LBCu an average relative density of 97% and a characteristic breaking strength of 77 MPa was achieved. Composition of PZT with 2 vol.% LBCu exhibits the highest averaged piezoelectrical charge constant (d33) of 181 pC/N
Availability note (English)
Available from http://dx.doi.org/10.1088/1742-6596/557/1/012132Additional details
Identifiers
Publishing Information
- Journal Title
- Journal of Physics. Conference Series (Online)
- Journal Volume
- 557
- Journal Issue
- 1
- Journal Page Range
- [5 p.]
- ISSN
- 1742-6596
Conference
- Title
- 14. International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications
- Acronym
- PowerMEMS 2014
- Dates
- 18-21 Nov 2014
- Place
- Awaji Island, Hyogo (Japan)
INIS
- Country of Publication
- United Kingdom
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 47014719
- Subject category
- S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- BISMUTH OXIDES; COPPER OXIDES; ELECTRODES; EUTECTICS; LEAD OXIDES; LITHIUM CARBONATES; LITHIUM OXIDES; MANGANESE OXIDES; MECHANICAL PROPERTIES; MICROSTRUCTURE; PIEZOELECTRICITY; POWDERS; PRESSURE RANGE MEGA PA; PZT; SINTERING; TEMPERATURE RANGE 0065-0273 K; THIN FILMS; TUNGSTEN OXIDES; VANADIUM OXIDES
- Descriptors DEC
- ALKALI METAL COMPOUNDS; BISMUTH COMPOUNDS; CARBON COMPOUNDS; CARBONATES; CHALCOGENIDES; COPPER COMPOUNDS; ELECTRICITY; FABRICATION; FILMS; LEAD COMPOUNDS; LITHIUM COMPOUNDS; MANGANESE COMPOUNDS; OXIDES; OXYGEN COMPOUNDS; PRESSURE RANGE; REFRACTORY METAL COMPOUNDS; TEMPERATURE RANGE; TITANATES; TITANIUM COMPOUNDS; TRANSITION ELEMENT COMPOUNDS; TUNGSTEN COMPOUNDS; VANADIUM COMPOUNDS; ZIRCONATES; ZIRCONIUM COMPOUNDS