Published September 1, 2011
| Version v1
Journal article
Development of in situ, at-wavelength metrology for soft X-ray nano-focusing
Creators
- 1. Advanced Light Source, Lawrence Berkeley National Laboratory, Berkeley, CA 94720 (United States)
- 2. Center for X-Ray Optics, Lawrence Berkeley National Laboratory, Berkeley, CA 94720 (United States)
Description
At the Advanced Light Source (ALS), we are developing broadly applicable, high-accuracy, in situ, at-wavelength wavefront slope measurement techniques for Kirkpatrick-Baez (KB) mirror nano-focusing. We describe here details of the metrology beamline endstation, the at-wavelength tests, and an original alignment method that have already allowed us to precisely set a bendable KB mirror to achieve a FWHM focused spot size of ∼120 nm, at 1 nm soft X-ray wavelength.
Availability note (English)
Available from http://dx.doi.org/10.1016/j.nima.2010.10.134Additional details
Identifiers
- DOI
- 10.1016/j.nima.2010.10.134;
- PII
- S0168-9002(10)02419-8;
Publishing Information
- Journal Title
- Nuclear Instruments and Methods in Physics Research. Section A, Accelerators, Spectrometers, Detectors and Associated Equipment
- Journal Volume
- 649
- Journal Issue
- 1
- Journal Page Range
- p. 160-162
- ISSN
- 0168-9002
- CODEN
- NIMAER
Conference
- Title
- 16. Pan-American national synchrotron radiation instrumentation conference
- Acronym
- SRI2010
- Dates
- 21-24 Sep 2010
- Place
- Argonne, IL (United States)
INIS
- Country of Publication
- Netherlands
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 44001611
- Subject category
- S46: INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- ACCURACY; ADVANCED LIGHT SOURCE; ALIGNMENT; FOCUSING; MIRRORS; SOFT X RADIATION; SYNCHROTRON RADIATION; WAVELENGTHS
- Descriptors DEC
- BREMSSTRAHLUNG; ELECTROMAGNETIC RADIATION; IONIZING RADIATIONS; RADIATION SOURCES; RADIATIONS; STORAGE RINGS; SYNCHROTRON RADIATION SOURCES; X RADIATION
Optional Information
- Copyright
- Copyright (c) 2010 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.