Theoretical computation of thermophysical properties of high-temperature F2, CF4, C2F2, C2F4, C2F6, C3F6 and C3F8 plasmas

The calculated values of thermodynamic and transport properties of pure F2 and fluorocarbon compounds CF4, C2F2, C2F4, C2F6, C3F6 and C3F8 at high temperatures are presented in this paper. The thermodynamic properties are determined by the method of Gibbs free energy minimization, using standard thermodynamic tables. The transport properties, including electron diffusion coefficients, viscosity, thermal conductivity and electrical conductivity, are evaluated using the Chapman-Enskog method expanded up to the third-order approximation (second order for viscosity). The most accurate cross-section data that could be located are used to evaluate collision integrals. The calculations based on the assumption of local thermodynamic equilibrium are performed for atmospheric-pressure plasmas in the temperature range from 300 to 30 000 K for different pressures between 0.1 and 10 atm. The results of F2, CF4, C2F2, C2F4 and C2F6 are compared with those of previously published studies. Larger discrepancies occur for transport coefficients; these are explained in terms of the different values of the collision integrals that were used. The results presented here are expected to be more accurate because of the improved collision integrals employed. (paper)