Published 1995 | Version v1
Miscellaneous Metadata-only

Improvement of the active layers of a MIS-structure semiconductor gas sensor for HF and F2

Creators

  • 1. Humboldt-Universitaet, Berlin (Germany)
  • 2. RRC Kurchatov Institute Moscow (Russian Federation)
  • 3. Freie Univ. Berlin (Germany)

Description

Short communication

Part of:
Abstracts of 5. International Workshop Electronic Properties of Metal/Non-metal Microsystems

Additional details

Additional titles

Augmented title (English)
LaF_3 has been used

Publishing Information

Publisher
Technical University of Wroclaw.
Imprint Place
Wroclaw (Poland)
Imprint Title
Abstracts of 5. International Workshop Electronic Properties of Metal/Non-metal Microsystems
Imprint Pagination
148 p.
Journal Page Range
p. 92.

Conference

Title
5. International Workshop on Electronic Properties of Metal/Non-metal Microsystems.
Dates
11-14 Sep 1995.
Place
Polanica Zdroj (Poland).

INIS

Country of Publication
Poland
Country of Input or Organization
Poland
INIS RN
28067337
Subject category
S36: MATERIALS SCIENCE;
Resource subtype / Literary indicator
Conference, No Abstract, Non-conventional Literature
Descriptors DEI
CRYSTAL STRUCTURE; FLUORINE; GAS ANALYSIS; HYDROFLUORIC ACID; LANTHANUM FLUORIDES; MEETINGS; MIS TRANSISTORS; PHYSICAL PROPERTIES; PLATINUM; QUANTITATIVE CHEMICAL ANALYSIS; SEMICONDUCTOR MATERIALS; SUBSTRATES
Descriptors DEC
CHEMICAL ANALYSIS; ELEMENTS; FLUORIDES; FLUORINE COMPOUNDS; HALIDES; HALOGEN COMPOUNDS; HALOGENS; HYDROGEN COMPOUNDS; INORGANIC ACIDS; INORGANIC COMPOUNDS; LANTHANUM COMPOUNDS; MATERIALS; METALS; NONMETALS; PLATINUM METALS; RARE EARTH COMPOUNDS; SEMICONDUCTOR DEVICES; TRANSISTORS; TRANSITION ELEMENTS

Optional Information