Published October 2004
| Version v1
Journal article
Different modes of capacitively coupled radio-frequency discharge in methane
Creators
- 1. Institute of Theoretical and Applied Mechanics, Siberian Division, Russian Academy of Sciences, Novosibirsk, 630090 (Russian Federation)
Description
Two different modes of capacitively coupled radio-frequency (RF) discharge in methane at gas pressures between 0.01 and 1.00 Torr are examined by numerical simulation based on a combined approach. It is shown that transition between volume-dominated and active-sheath modes is caused by variation of discharge current or gas pressure. Hysteretic behavior is revealed as the discharge current density is varied along the growing- and falling-current branches of the current-density curve. A phase diagram representing the domains of different discharge modes is obtained in wide current and pressure ranges
Additional details
Identifiers
- DOI
- 10.1134/1.1826162;
Publishing Information
- Journal Title
- Journal of Experimental and Theoretical Physics
- Journal Volume
- 99
- Journal Issue
- 4
- Journal Page Range
- p. 719-726
- ISSN
- 1063-7761
- CODEN
- JTPHES
INIS
- Country of Publication
- United States
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 36049585
- Subject category
- S70: PLASMA PHYSICS AND FUSION TECHNOLOGY;
- Resource subtype / Literary indicator
- Translation
- Descriptors DEI
- CURRENT DENSITY; ELECTRIC DISCHARGES; ELECTRODES; GASES; METHANE; PHASE DIAGRAMS; PLASMA DENSITY; PRESSURE RANGE PA; RADIOWAVE RADIATION; SIMULATION
- Descriptors DEC
- ALKANES; DIAGRAMS; ELECTROMAGNETIC RADIATION; FLUIDS; HYDROCARBONS; INFORMATION; ORGANIC COMPOUNDS; PRESSURE RANGE; RADIATIONS
Optional Information
- Notes
- Translated from Zhurnal Ehksperimental'noj i Teoreticheskoj Fiziki, ISSN 0044-4510, 126, 833-842 (No. 4, 2004); (c) 2004 MAIK ''Nauka / Interperiodica''.