Published September 2017 | Version v1
Miscellaneous Open

The role of titanium nitride in technology for formation of titanium silicides

Creators

  • 1. Physicotechnical institute of the national academy of sciences of Belarus, Minsk (Belarus)
  • 2. OJSC INTEGRAL, Minsk (Belarus)
  • 3. Institute of physics. B.I. Stepanova, national academy of sciences of Belarus, Minsk (Belarus)
  • 4. Voronezh state technical university, Voronezh (Belarus)

Description

It is shown that the titanium nitride film has a diffusion barrier property, which makes it possible to obtain high-quality titanium silicide films. (authors)

Files

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Part of:
Interaction of radiation with solids. Proceedings of 12. International conference

Additional details

Additional titles

Original title (Russian)
Рол' нитрида титана в технологии формирования силицидов титана

Publishing Information

Imprint Place
Minsk (Belarus)
ISBN
978-985-553-446-5
Imprint Title
Interaction of radiation with solids. Proceedings of 12. International conference
Imprint Pagination
483 p.
Journal Page Range
p. 464-465
Report number
INIS-BY--103

Conference

Title
12. International conference 'Interaction of radiation with solids'
Original Conference Title
12. Mezhdunarodnaya konferentsiya 'Vzaimodejstvie izluchenij s tverdym telom'
Dates
19-22 Sep 2017
Place
Minsk (Belarus)

INIS

Country of Publication
Belarus
Country of Input or Organization
Belarus
INIS RN
50011333
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Resource subtype / Literary indicator
Conference
Descriptors DEI
DIFFUSION BARRIERS; FILMS; TITANIUM NITRIDES; TITANIUM SILICIDES
Descriptors DEC
NITRIDES; NITROGEN COMPOUNDS; PNICTIDES; SILICIDES; SILICON COMPOUNDS; TITANIUM COMPOUNDS; TRANSITION ELEMENT COMPOUNDS

Optional Information

Notes
6 refs., 3 figs. Imprint:Vzaimodejstvie izluchenij s tverdym telom. Materialy 12. Mezhdunarodnoj konferentsii