Published February 15, 1978
| Version v1
Journal article
The use of proton-excited X-rays for thin-film profiling
Creators
- 1. Bureau of Mines, College Park, Md. (USA). College Park Metallurgy Research Center
Description
no abstract available
Additional details
Identifiers
Publishing Information
- Journal Title
- Nuclear Instruments and Methods
- Journal Volume
- 149
- Journal Issue
- 1-3
- Series
- Nucl. Instrum. Methods.
- Journal Page Range
- 496
- ISSN
- 0029-554X
Conference
- Title
- 3. international conference on ion beam analysis.
- Dates
- 27 Jun - 1 Jul 1977.
- Place
- Washington, D.C., USA.
INIS
- Country of Publication
- Netherlands
- Country of Input or Organization
- Netherlands
- INIS RN
- 9385392
- Subject category
- S37: INORGANIC, ORGANIC, PHYSICAL AND ANALYTICAL CHEMISTRY;
- Resource subtype / Literary indicator
- Conference, No Abstract
- Descriptors DEI
- ARGON IONS; DEPTH; FILMS; KEV RANGE 100-1000; LI-DRIFTED SI DETECTORS; PROPORTIONAL COUNTERS; PROTON BEAMS; QUANTITATIVE CHEMICAL ANALYSIS; SPATIAL DISTRIBUTION; SPUTTERING; SURFACES; X RADIATION; X-RAY EMISSION ANALYSIS
- Descriptors DEC
- BEAMS; CHARGED PARTICLES; CHEMICAL ANALYSIS; DIMENSIONS; DISTRIBUTION; ELECTROMAGNETIC RADIATION; ENERGY RANGE; IONIZING RADIATIONS; IONS; KEV RANGE; LI-DRIFTED DETECTORS; MEASURING INSTRUMENTS; NONDESTRUCTIVE ANALYSIS; NUCLEON BEAMS; PARTICLE BEAMS; RADIATION DETECTORS; RADIATIONS; SEMICONDUCTOR DETECTORS; SI SEMICONDUCTOR DETECTORS
Optional Information
- Notes
- Published in summary form only.; Updated automatically by Metadata and Full-Text Enrichment Agent