Design and Analysis of Resonance Transition Radiation X-ray Source for Tabletop Synchrotron

A soft X-ray source with a periodic Al multi-layer structure for a tabletop synchrotron was designed and the dependence of radiation performance on structural parameters was clarified by using a theoretical calculation of resonance transition radiation. The spectral intensity of photon per incident electron at emitted photon of 1 keV was calculated by optimizing the Al thickness and vacuum space. Furthermore the designed structure was fabricated by microfabrication technique. Based on the fabrication results, we discussed dimension errors of Al thickness and vacuum space. It was confirmed that the vacuum space should be ranged from 90 nm to 140 nm to obtain the spatial total intensity of more than 90 percents of the maximum value of radiation intensity