Published October 31, 2005
| Version v1
Journal article
Synthesis and Deposition of Nanoparticles Using a Hypersonically Expanded Plasma
Creators
- 1. Department of Mechanical Engineering, University of Minnesota, 111 Church Street SE, Minneapolis, MN (United States)
Description
Si-Ti-N nanostructured coatings were synthesized by inertial impaction of nanoparticles using a process called hypersonic plasma particle deposition (HPPD). Transmission electron microscopy on samples prepared by focused ion beam (FIB) milling show TiN nanocrystallites in an amorphous matrix. X-ray photoelectron spectroscopy results indicate the presence of amorphous Si3N4 in similar films. In-situ particle size distribution measurements show that particle size distributions peak around 14 nm under typical operating conditions
Additional details
Identifiers
- DOI
- 10.1063/1.2134678;
Publishing Information
- Journal Title
- AIP Conference Proceedings
- Journal Volume
- 799
- Journal Issue
- 1
- Journal Page Range
- p. 514-517
- ISSN
- 0094-243X
- CODEN
- APCPCS
Conference
- Title
- 4. international conference on the physics of dusty plasmas
- Dates
- 13-17 Jun 2005
- Place
- Orleans (France)
INIS
- Country of Publication
- United States
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 37038275
- Subject category
- S70: PLASMA PHYSICS AND FUSION TECHNOLOGY; S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- COATINGS; DEPOSITION; DISTRIBUTION; FILMS; ION BEAMS; MILLING; NANOSTRUCTURES; PARTICLE SIZE; PARTICLES; PLASMA; SYNTHESIS; TITANIUM NITRIDES; TRANSMISSION ELECTRON MICROSCOPY; ULTRASONIC WAVES; X-RAY PHOTOELECTRON SPECTROSCOPY
- Descriptors DEC
- BEAMS; ELECTRON MICROSCOPY; ELECTRON SPECTROSCOPY; MACHINING; MICROSCOPY; NITRIDES; NITROGEN COMPOUNDS; PHOTOELECTRON SPECTROSCOPY; PNICTIDES; SIZE; SOUND WAVES; SPECTROSCOPY; TITANIUM COMPOUNDS; TRANSITION ELEMENT COMPOUNDS
Optional Information
- Notes
- (c) 2005 American Institute of Physics