Published January 1990 | Version v1
Journal article

Ion channeling study of single-crystal columns of CoSi2 embedded in epitaxial Si on Si(111) grown by MBE

  • 1. Dept. of Physics and Inst. for Particle-Solid Interactions, State Univ. of New York, Albany, NY (USA)
  • 2. Keck Lab. of Engineering, California Inst. of Tech., Pasadena, CA (USA)
  • 3. Jet Propulsion Lab., California Inst. of Tech., Pasadena, CA (USA)

Description

Codeposition of Si and Co on a heated Si(111) substrate with a Si/Co ratio much greater than 3 results in epitaxial columns of CoSi2 (χmin ≅ 4%) embedded in high quality epitaxial Si (χmin ≅ 3%). The average lattice distortion (or strain) in CoSi2 columns is estimated by channeling along off-normal axes. Due primarily to constraints by the surrounding Si lattice, the unit cell of the CoSi2 lattice in the columns is elongated perpendicular to the substrate when the average aspect ratio, [height]/[average diameter], of the columns is greater than ≅ 1.4. (orig.)

Additional details

Publishing Information

Journal Title
Nuclear Instruments and Methods in Physics Research, Section B
Journal Volume
45
Journal Issue
1-4
Series
Nucl. Instrum. Methods Phys. Res., Sect. B.
Journal Page Range
434-437
ISSN
0168-583X
CODEN
NIMBE

Conference

Title
9. international conference on ion beam analysis (IBA-9).
Dates
26-30 Jun 1989.
Place
Kingston (Canada).

INIS

Country of Publication
Netherlands
Country of Input or Organization
Netherlands
INIS RN
21068887
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Resource subtype / Literary indicator
Conference
Descriptors DEI
COBALT SILICIDES; FILMS; INTERFACES; ION CHANNELING; MONOCRYSTALS; SILICON; STRAINS; SUBSTRATES; TEMPERATURE DEPENDENCE
Descriptors DEC
CHANNELING; COBALT COMPOUNDS; CRYSTALS; ELEMENTS; SEMIMETALS; SILICIDES; SILICON COMPOUNDS; TRANSITION ELEMENT COMPOUNDS