Published November 1981
| Version v1
Journal article
Trajectory calculations of the extraction region of a liquid-metal ion source
Creators
- 1. Hughes Research Laboratories, 3011 Malibu Canyon Road, Malibu, California 90265
Description
In the ion-extraction region of a liquid-metal (LM) source, several phenomena occur (e.g., electrostatic-lens action, axial and transverse space-charge interactions) that have major effects on the performance of the source. In an effort to better understand these effects, a trajectory analysis was made of the ion-extraction region. The trajectory calculations showed an appreciable increase in beam divergence at a Ga+ source current of only 5 μA
Additional details
Publishing Information
- Journal Title
- J. Vac. Sci. Technol.
- Journal Volume
- 19
- Journal Issue
- 4
- Series
- J. Vac. Sci. Technol.
- Journal Page Range
- 1082-1086
- ISSN
- 0022-5355
INIS
- Country of Publication
- United States
- Country of Input or Organization
- United States
- INIS RN
- 13666422
- Subject category
- S74: ATOMIC AND MOLECULAR PHYSICS;
- Descriptors DEI
- BEAM EXTRACTION; COMPUTERIZED SIMULATION; ELECTRIC POTENTIAL; ELECTROSTATIC LENSES; GALLIUM IONS; ION SOURCES; LAPLACE EQUATION; LIQUID METALS; POISSON EQUATION; TRAJECTORIES
- Descriptors DEC
- ATOMIC IONS; CHARGED PARTICLES; DIFFERENTIAL EQUATIONS; ELEMENTS; EQUATIONS; FLUIDS; IONS; LENSES; LIQUIDS; METALS; SIMULATION