Published November 1981 | Version v1
Journal article

Trajectory calculations of the extraction region of a liquid-metal ion source

  • 1. Hughes Research Laboratories, 3011 Malibu Canyon Road, Malibu, California 90265

Description

In the ion-extraction region of a liquid-metal (LM) source, several phenomena occur (e.g., electrostatic-lens action, axial and transverse space-charge interactions) that have major effects on the performance of the source. In an effort to better understand these effects, a trajectory analysis was made of the ion-extraction region. The trajectory calculations showed an appreciable increase in beam divergence at a Ga+ source current of only 5 μA

Additional details

Publishing Information

Journal Title
J. Vac. Sci. Technol.
Journal Volume
19
Journal Issue
4
Series
J. Vac. Sci. Technol.
Journal Page Range
1082-1086
ISSN
0022-5355