Published 2001 | Version v1
Miscellaneous Metadata-only

Electric characterization and plasma processing of nanocrystalline c-BN layers

Creators

  • 1. Institute of Microelectronics and Optoelectronics, Warsaw University of Technology, Warsaw (Poland)
  • 2. Faculty of Materials Science and Engineering, Warsaw University of Technology, Warsaw (Poland)

Description

no abstract available

Part of:
Abstracts of 3. International Conference Novel Applications of Wide Bandgap Layers

Additional details

Publishing Information

Publisher
Oficyna Wydawnicza Politechniki Warszawskiej
ISBN
0-7803-7136-4
Imprint Title
Abstracts of 3. International Conference Novel Applications of Wide Bandgap Layers
Imprint Pagination
207 p.
Journal Page Range
p. 161-162

Conference

Title
Novel Applications of Wide Bandgap Layers
Acronym
3. International Conference
Dates
26-30 Jun 2001
Place
Zakopane (Poland)

INIS

Country of Publication
Poland
Country of Input or Organization
Poland
INIS RN
33033804
Subject category
S36: MATERIALS SCIENCE;
Resource subtype / Literary indicator
No Abstract, Conference, Non-conventional Literature
Descriptors DEI
ALUMINIUM; BORON NITRIDES; DEPOSITION; ELECTRICAL PROPERTIES; ETCHING; LAYERS; MICROSTRUCTURE; PLASMA; SCANNING ELECTRON MICROSCOPY; SILICON; SUBSTRATES; THIN FILMS
Descriptors DEC
BORON COMPOUNDS; ELECTRON MICROSCOPY; ELEMENTS; FILMS; METALS; MICROSCOPY; NITRIDES; NITROGEN COMPOUNDS; PHYSICAL PROPERTIES; PNICTIDES; SEMIMETALS; SURFACE FINISHING

Optional Information

Contract/Grant/Project number
KBN grant no. 8T11B07319
Notes
1 ref., 2 figs