Published March 1984 | Version v1
Journal article

A universal relation for the sputtering yield of monatomic solids at normal ion incidence

Creators

  • 1. Association Euratom-Max-Planck-Institut fuer Plasmaphysik, Garching (Germany, F.R.)

Description

The sputtering yield of polycrystalline monatomic solids at normal incidence show an universal behaviour for light and heavy ions in the threshold regime. For heavy ions at higher energies a similar behaviour has been explained, based on first principles. In this work a relation is derived valid for both of these energy regimes. The relation is based on reasonable assumptions for the momentum distribution for light ion sputtering - is also introduced. It is shown that experimental data for light ion sputtering at higher energy are also in good agreement with this relation. (orig.)

Additional details

Publishing Information

Journal Title
Nucl. Instrum. Methods Phys. Res., Sect. B
Journal Volume
230
Journal Issue
1-3
Series
CODEN: NIMBE.;Nucl. Instrum. Methods Phys. Res., Sect. B.
Journal Page Range
587-591
ISSN
0168-583X

Conference

Title
10. international conference on atomic collisions in solids.
Dates
18-22 Jul 1983.
Place
Bad Iburg (Germany, F.R.).

INIS

Country of Publication
Netherlands
Country of Input or Organization
Netherlands
INIS RN
15065385
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Resource subtype / Literary indicator
Conference, Numerical Data
Descriptors DEI
EFFICIENCY; ENERGY SPECTRA; EXPERIMENTAL DATA; HEAVY IONS; LIGHT IONS; MONTE CARLO METHOD; POLYCRYSTALS; SOLIDS; SPUTTERING; THEORETICAL DATA; TRANSPORT THEORY
Descriptors DEC
CHARGED PARTICLES; CRYSTALS; DATA; INFORMATION; IONS; NUMERICAL DATA; SPECTRA