Published March 1984
| Version v1
Journal article
A universal relation for the sputtering yield of monatomic solids at normal ion incidence
Creators
- 1. Association Euratom-Max-Planck-Institut fuer Plasmaphysik, Garching (Germany, F.R.)
Description
The sputtering yield of polycrystalline monatomic solids at normal incidence show an universal behaviour for light and heavy ions in the threshold regime. For heavy ions at higher energies a similar behaviour has been explained, based on first principles. In this work a relation is derived valid for both of these energy regimes. The relation is based on reasonable assumptions for the momentum distribution for light ion sputtering - is also introduced. It is shown that experimental data for light ion sputtering at higher energy are also in good agreement with this relation. (orig.)
Additional details
Publishing Information
- Journal Title
- Nucl. Instrum. Methods Phys. Res., Sect. B
- Journal Volume
- 230
- Journal Issue
- 1-3
- Series
- CODEN: NIMBE.;Nucl. Instrum. Methods Phys. Res., Sect. B.
- Journal Page Range
- 587-591
- ISSN
- 0168-583X
Conference
- Title
- 10. international conference on atomic collisions in solids.
- Dates
- 18-22 Jul 1983.
- Place
- Bad Iburg (Germany, F.R.).
INIS
- Country of Publication
- Netherlands
- Country of Input or Organization
- Netherlands
- INIS RN
- 15065385
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Resource subtype / Literary indicator
- Conference, Numerical Data
- Descriptors DEI
- EFFICIENCY; ENERGY SPECTRA; EXPERIMENTAL DATA; HEAVY IONS; LIGHT IONS; MONTE CARLO METHOD; POLYCRYSTALS; SOLIDS; SPUTTERING; THEORETICAL DATA; TRANSPORT THEORY
- Descriptors DEC
- CHARGED PARTICLES; CRYSTALS; DATA; INFORMATION; IONS; NUMERICAL DATA; SPECTRA