Published 2015 | Version v1
Miscellaneous

Modification of silicon surface structure at silver ion implantation

  • 1. Kazanskij (Privolzhskij) Federal'nyj Univ., Kazan' (Russian Federation)
  • 2. Kazanskij Fiziko-Tekhnicheskij Inst. im. E.K. Zavojskogo KazNTs RAN, Kazan' (Russian Federation)

Description

no abstract available

Part of:
Summaries of reports of XLV International Tulinov conference on physics of interactions of charged particles with crystals

Additional details

Additional titles

Original title (Russian)
Модификация структуры поверхности кремния при имплантации ионами серебра

Publishing Information

Publisher
Universitetskaya kniga
Imprint Place
Moscow (Russian Federation)
Imprint Title
Summaries of reports of XLV International Tulinov conference on physics of interactions of charged particles with crystals
Imprint Pagination
190 p.
Journal Page Range
p. 76
Report number
INIS-RU--607

Conference

Title
45. International Tulinov conference on physics of interactions of charged particles with crystals
Original Conference Title
XLV mezhdunarodnaya Tulinovskaya konferentsiya po fizike vzaimodejstviya zaryazhennykh chastits s kristallami
Dates
26-28 May 2015
Place
Moscow (Russian Federation)

INIS

Country of Publication
Russian Federation
Country of Input or Organization
Russian Federation
INIS RN
49086252
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Resource subtype / Literary indicator
No Abstract, Conference, Numerical Data
Descriptors DEI
AMORPHOUS STATE; ARGON IONS; CRYSTAL STRUCTURE; CRYSTAL-PHASE TRANSFORMATIONS; ELECTRON MICROSCOPES; EXPERIMENTAL DATA; ION BEAMS; ION IMPLANTATION; KEV RANGE 10-100; KIKUCHI LINES; MONOCRYSTALS; RADIATION DOSES; SILICON
Descriptors DEC
BEAMS; CHARGED PARTICLES; CRYSTALS; DATA; DOSES; ELEMENTS; ENERGY RANGE; INFORMATION; IONS; KEV RANGE; MICROSCOPES; NUMERICAL DATA; PHASE TRANSFORMATIONS; SEMIMETALS

Optional Information

Notes
1 ref. Imprint:Tezisy dokladov XLV mezhdunarodnoj Tulinovskoj konferentsii po fizike vzaimodejstviya zaryazhennykh chastits s kristallami