Combined implantation of carbon and nitrogen ions in molybdenum

The problem on the most probable bonds, which can be brought about between atoms of molybdenum, carbon, nitrogen under conditions of ion implantation, is investigated by sequential implantation of carbon and nitrogen ions correspondingly in N+- and C+-implanted samples of molybdenum. Experiments carried out in massive samples of monocrystaline molybdenum by X-ray analysis using a sliding beam have shown that formation of molybdenum nitrides is more preferable in comparison with occurrence of other possible phases (carbides and carbonitrides). 5 refs.; 2 figs