Interactions of electrons with amorphous or polycrystalline specimens. The emission of characteristic X-rays

An electron transport equation is applied to study electron-specimen interaction in microanalysis. Values of the absorption function f(chi), the fraction of X-rays generated as a function of wavelength and take-off angle, are calculated. This expression is carried out with critical hypothesis on the multiple scattering process. Some curves are plotted in the case where a thick target is bombarded by an electron beam of an energy between 10 and 60 keV. Good agreement is found between this analytical calculation and several theoretical or experimental characteristic X-ray intensity determinations. (author)