Published 2017
| Version v1
Miscellaneous
Experimental validation of numerical plasma simulations for niobium coating by DC-magnetron and bias diode sputtering
- 1. EPFL, (Switzerland)
- 2. CERN (Switzerland)
Description
no abstract available
Additional details
Additional titles
- Original title (English)
- Gemeinsame Jahrestagung von SPG und ÖPG
Identifiers
Publishing Information
- Publisher
- Swiss Physical Society
- Imprint Place
- Basel (Switzerland)
- Imprint Title
- Joint Annual Meeting of the Swiss Physical Society and the Austrian Physical Society
- Imprint Pagination
- 129 p.
- Journal Page Range
- p. 58
Conference
- Title
- Joint Annual Meeting of the Swiss Physical Society and the Austrian Physical Society
- Original Conference Title
- Gemeinsame Jahrestagung von SPG und ÖPG
- Dates
- 21-25 Aug 2017
- Place
- Geneve (Switzerland)
INIS
- Country of Publication
- Switzerland
- Country of Input or Organization
- Austria
- INIS RN
- 49013512
- Subject category
- S71: CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS;
- Resource subtype / Literary indicator
- No Abstract, Conference, Non-conventional Literature
- Descriptors DEI
- COATINGS; COMPARATIVE EVALUATIONS; COPPER; CYLINDRICAL CONFIGURATION; DEPOSITION; ELECTRON TEMPERATURE; LANGMUIR PROBE; MAGNETRONS; MONTE CARLO METHOD; NIOBIUM; OPTIMIZATION; PLASMA DENSITY; PLASMA SIMULATION; RADIOWAVE RADIATION; SPUTTERING; THIN FILMS; VALIDATION
- Descriptors DEC
- CALCULATION METHODS; CONFIGURATION; ELECTRIC PROBES; ELECTROMAGNETIC RADIATION; ELECTRON TUBES; ELECTRONIC EQUIPMENT; ELEMENTS; EQUIPMENT; EVALUATION; FILMS; METALS; MICROWAVE EQUIPMENT; MICROWAVE TUBES; PROBES; RADIATIONS; REFRACTORY METALS; SIMULATION; TESTING; TRANSITION ELEMENTS
Optional Information
- Notes
- Imprint:Gemeinsame Jahrestagung von SPG und #Latin Capital Letter O With Diaeresis#PG