Published February 1990 | Version v1
Journal article

Brownian movement at multiple scattering of electrons in thick targets

Description

A diffusion model for describing a multiple scattering of 1-100 keV energy electron probe in thick targets is proposed. Energy spectra of backscattered electrons are calculated for aluminium, copper and gold. A good agreement with the experiment and calculation according to the Monte Carlo method is obtained

Additional details

Additional titles

Original title (Russian)
Броуновское движение при многократном рассеянии электронов в толстых мишенях

Publishing Information

Journal Title
Izvestiya Akademii Nauk SSSR, Seriya Fizicheskaya
Journal Volume
54
Journal Issue
2
Series
Izv. Akad. Nauk SSSR, Ser. Fiz.
Journal Page Range
243-246
ISSN
0367-6765
CODEN
IANFA

Conference

Title
5. All-Union symposium on scanning electron microscopy and analytical techniques for investigation of solids.
Dates
1 Apr 1989.
Place
Zvenigorod (USSR).