Published April 2010 | Version v1
Journal article Metadata-only

Faceting of twin tips inside grains of polysilicon films

Creators

  • 1. Kiyivs'kij Unyiversitet, Kyiv (Ukraine)

Description

The faceting of the tip of twin plates inside grains of polysilicon films, produced by low-pressure chemical vapor deposition, has been investigated by transmission electron microscopy. It has been shown that the type of facets change depending on the annealing temperature.

Additional details

Additional titles

Original title (Ukrainian)
Fasetuvannya vershin dvyijnikyiv v zernakh polyikremnyijevikh plyivok

Publishing Information

Journal Title
Vyisnik Kiyivs'kogo Unyiversitetu. Fyiziko-matematichnyi nauki
Journal Issue
no.2
Journal Page Range
p. 201-205
ISSN
1812-5409

INIS

Country of Publication
Ukraine
Country of Input or Organization
Ukraine
INIS RN
43065654
Subject category
S36: MATERIALS SCIENCE;
Descriptors DEI
ANNEALING; ELECTRON MICROSCOPY; FILMS; MICROSTRUCTURE; PHYSICAL VAPOR DEPOSITION; POLYCRYSTALS; SILICON; TEMPERATURE DEPENDENCE
Descriptors DEC
CRYSTALS; DEPOSITION; ELEMENTS; HEAT TREATMENTS; MICROSCOPY; SEMIMETALS; SURFACE COATING