Published 1995
| Version v1
Book
Characterization of Ar+ sputtering effects in a single-crystal CdTe by AES and XPS
Description
Single crystal CdTe samples were sputtered with 0.5-4.0 keV Ar+ beams and characterized using AES and XPS. Quantities determined in this study include the degree of preferential sputtering of Cd for different sputtering conditions and the sputter rate of CdTe under these conditions. Depth profiles as a function of ion dose for different ion energies are compared to show beam effects during sputtering. Results from these experiments show no significant change in the relative sputter yields of Cd and Te as a function of ion energy. Observed differences in results obtained with XPS and AES are discussed
Additional details
Publishing Information
- Publisher
- Pennsylvania State Univ.
- Imprint Place
- University Park, PA (United States)
- Imprint Title
- Surface analysis '95. Final program
- Imprint Pagination
- 86 p.
- Journal Page Range
- p. P13.
Conference
- Title
- Surface analysis '95.
- Dates
- 7-9 Jun 1995.
- Place
- University Park, PA (United States).
INIS
- Country of Publication
- United States
- Country of Input or Organization
- United States
- INIS RN
- 27065060
- Subject category
- S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- ARGON; CADMIUM TELLURIDES; CATIONS; COLLISIONS; ION-MOLECULE COLLISIONS; PHOTOELECTRON SPECTROSCOPY; PHYSICAL RADIATION EFFECTS; SPUTTERING; X-RAY SPECTROSCOPY
- Descriptors DEC
- CADMIUM COMPOUNDS; CHALCOGENIDES; CHARGED PARTICLES; ELECTRON SPECTROSCOPY; ELEMENTS; ION COLLISIONS; IONS; MOLECULE COLLISIONS; NONMETALS; RADIATION EFFECTS; RARE GASES; SPECTROSCOPY; TELLURIDES; TELLURIUM COMPOUNDS
Optional Information
- Secondary number(s)
- CONF-9506225--.