Published 1995 | Version v1
Book

Characterization of Ar+ sputtering effects in a single-crystal CdTe by AES and XPS

  • 1. National Renewable Energy Lab., Golden, CO (United States)

Description

Single crystal CdTe samples were sputtered with 0.5-4.0 keV Ar+ beams and characterized using AES and XPS. Quantities determined in this study include the degree of preferential sputtering of Cd for different sputtering conditions and the sputter rate of CdTe under these conditions. Depth profiles as a function of ion dose for different ion energies are compared to show beam effects during sputtering. Results from these experiments show no significant change in the relative sputter yields of Cd and Te as a function of ion energy. Observed differences in results obtained with XPS and AES are discussed

Additional details

Publishing Information

Publisher
Pennsylvania State Univ.
Imprint Place
University Park, PA (United States)
Imprint Title
Surface analysis '95. Final program
Imprint Pagination
86 p.
Journal Page Range
p. P13.

Conference

Title
Surface analysis '95.
Dates
7-9 Jun 1995.
Place
University Park, PA (United States).

INIS

Optional Information

Secondary number(s)
CONF-9506225--.