Published 1989 | Version v1
Report Open

X-ray lithography source (SXLS) vacuum system

Creators

Description

In 1988 Brookhaven National Laboratory (BNL) was awarded a contract to design and construct a compact light source for x-ray lithography. This award is part of a technology transfer-to-American-industry program. The contract is for an electron storage ring designed for 690 MeV-500 ma operations. It has a racetrack configuration with a circumference to 8.5 meters. The machine is to be constructed in two phases. Phase I (200 MeV-500ma) will primarily be for low energy injection studies and will incorporate all room temperature magnets. For Phase II the two room temperature dipole magnets will be replaced with (4T) superconducting magnets and operation will be at 690 MeV. This paper describes the vacuum system for this machine. 9 refs

Availability note (English)

MF available from INIS under the Report Number; Available from NTIS, PC A02/MF A01 as DE90002290; OSTI; INIS; US Govt. Printing Office Dep.

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Additional details

Publishing Information

Imprint Pagination
2 p.
Report number
BNL--43346

Conference

Title
13. particle accelerator conference.
Dates
20-23 Mar 1989.
Place
Chicago, IL (USA).

INIS

Country of Publication
United States
Country of Input or Organization
United States
INIS RN
21020101
Subject category
S43: PARTICLE ACCELERATORS;
Resource subtype / Literary indicator
Conference
Descriptors DEI
DEGASSING; SPECIFICATIONS; VACUUM PUMPS; VACUUM SYSTEMS; X-RAY SOURCES
Descriptors DEC
EQUIPMENT; PUMPS; RADIATION SOURCES

Optional Information

Contract/Grant/Project number
Contract AC02-76CH00016
Secondary number(s)
CONF-890335--264.