Published 1999 | Version v1
Journal article

The spectral selective absorber layers created by the dc reactive magnetron sputtering

  • 1. Institute of Physics of NASU, Prospect Nauki 46, Kiev (Ukraine)

Description

Optical characteristics of SnOx, CrOx, stainless steel oxides and AlNX films investigated in the wavelength range from 0.3μm to 25μm. All films were formed by reactive dc magnetron sputtering. optical characteristics of multilayer spectral selective absorbers formed on the base of these light absorption films, were determined. The main task of the research is developing of magnetron sputtering technologies for producing of solar absorbers

Additional details

Publishing Information

Journal Title
Problems of Atomic Science and Technology. Series: Plasma Physics
Journal Volume
3,4
Journal Issue
3,4
Journal Page Range
p. 253-255
ISSN
1682-9344

Conference

Title
6. Ukrainian Conference on Plasma Physics and Controlled Fusion
Dates
14-20 Sep 1998
Place
Alushta (Ukraine)